MEMS Fabrication Tools

  • STS Pegasus Deep Reactive Ion Etcher
  • STS ICP Deep Reactive Ion Etcher
  • Photo-Resist Spinner
  • EVG Aligner
  • OAI Aligner
  • EVG Bonder (Anodic, Fusion, Frit)
  • AML Bonder (Anodic, Fusion, Frit)
  • Megasonic Cleaner
  • High Temperature Furnaces
  • Sputter Deposition System
  • Two E-Beam Evaporators (one high volume, one R&D)
  • Plasma Oxygen Asher
  • Solvent Bench
  • Acid/Base Benches
  • Rinser/Dryer Tools (4 sets)
  • Programmable Ovens
  • Ultra Sonic Cleaner
  • Liftoff Modules
  • Screen Printer for Glass Frit Printing
  • EDP Reactor Cell
  • KOH System