Located in Ypsilanti, Michigan, Integrated Sensing Systems, Inc (ISS) facility is just a short drive from either Ann Arbor or Detroit Metropolitan airport. The facility supports MEMS design to production and commercialization.  The facility supports the design, production, assembly, packaging activities all under one roof.

Integrated Sensing Systems is based on strong intellectual assets in the form of intellectual property and people. The company maintains over 50 patents with several more in applications pending, relating to the design and implementation of MEMS based products and solutions. Integrated Sensing Systems believes that the greatest challenge in successfully bringing MEMS-based products to market is being able to consistently and repeatedly manufacture the MEMS devices and integrate them into systems. To meet this challenge, the company has invested millions of dollars and significant time in establishing its comprehensive facility and state-of-the-art equipment, and continues to invest heavily in this area. The fabrication facility can produce millions of MEMS devices per year and can easily be upgraded to quadruple its capacity.

The internal MEMS manufacturing facility supports the individual business units with the technology platform to assemble and package end product solutions for their industries of focus. Ultimately providing competitive and feature rich products to large and emerging markets.

Facility Capabilities:

  • Research
  • Design
  • Development
  • Prototyping
  • Manufacturing
  • Assembly
  • Packaging

Integrated Sensing Systems has built and maintained 2 clean rooms, chemical labs, and a back-end packaging and production area supported by specialized utilities and waste disposal capabilities. Design and testing is completed in the computer simulation lab and the sensing and electronics characterization and testing labs. The facility also supports a prototype machine shop and the corporate offices.

ISS´s comprehensive manufacturing infrastructure has the following advantages:

  • R&D, Prototyping, and Full Manufacturing Under One Roof
  • Comprehensive ISO 9001:2008 Certified Quality System
  • Medical Device Design Control process consistent with the FDA Quality System Regulation and ISO 13485:2003 requirements
  • Production of Multi-Million Bio-MEMS Units Per Year
  • Flexible Manufacturing (Rapid Prototyping and Production of Diverse Medical and Industrial MEMS-Based Products)
  • System Level Products (MEMS, Electronics, Assembly, Packaging, Testing)

Flexible Manufacturing

With the help of a 3-year DARPA grant for “Flexible Manufacturing of Dissolved-Wafer Silicon Capacitive Sensors”, ISS built its fabrication capability around the concept of flexibility. The essence of this approach is using common design elements, equipment, and processes to leverage ISS’ investment in a MEMS fabrication facility, and bring traditional high-volume economics to a collection of niche volume, higher-value products.

Quality Programs & Standards

To improve product quality, yields, customer service and manufacture-ability, ISS has a comprehensive quality program and is currently ISO 9001:2008 certified. Our quality system is also designed to meet ISO13485 standards for our medical products. ISS quality system is set up to meet the US FDA Quality System Regulation and European Union Medical Device Directive.

Quality Assurance


Clean Room

Two, on-site, Class 100 clean rooms to house MEMS-fabrication equipment. Standard wafer sizes are 4 inch (100 mm) and six inch (150 mm) diameters, and we have some additional capabilities for running 8 inch (200 mm) wafers.

Chemical Lab

Two, independent chemical labs to support MEMS processes. These chemical labs support the EDP and KOH wet chemical etching processes, including the high volume EDP reactor cell. Both chemical labs are equipped with permanent full-faced fume hoods.

Machine Shop

Provides on premise maintenance, repair, and prototype packaging options.

Production and Assembly

End product production line and assembly line for order fulfillment.

Tools & Equipment

The link provided includes additional details for tools & equipment: